| 发明名称 |
DETECTING SYSTEM OF PARTICLE |
| 摘要 |
An inspection system for detecting the presence of debris on ceramic green sheets prior to screening. The sheets are deposited on a planar stage using a pick-up head. The pick-up head carries a sensor to determine whether or not debris adhering to the head, the sheet or the stage is presenting a non-planar sheet surface. |
| 申请公布号 |
JPS603576(A) |
申请公布日期 |
1985.01.09 |
| 申请号 |
JP19840051300 |
申请日期 |
1984.03.19 |
| 申请人 |
INTERN BUSINESS MACHINES CORP |
发明人 |
IBUSU DAABUSUUBORUNOTSU;JIYOOJI II MERUBUIN;MAIKERU JII RAIAN;DENISU ERU SEIRAA |
| 分类号 |
G01V9/00;G01B5/28 |
主分类号 |
G01V9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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