发明名称 WIRE BONDING METHOD
摘要 PURPOSE:To enable to perform ball bonding according to an Al fine wire by a method wherein the metal wire whose surface is coated with an insulating film having a fusion point higher than the fusion point of the metal wire is used. CONSTITUTION:At this wire bonding, an Al fine wire 7 formed uniformly with an insulating film 8 previously is used. As action of the film 8 thereof, because it is to check a phenomenon that an arc 5 is not concentrated to the tip of the fine wire 7, and to creep up the side, for a property needed for the film 8, the film is not fused and dissolved at the fusion point of Al, and to prevent the fine wire 7 from the arc 5. Therefore to make the film to be provided with a fusion point higher than the fusion point of Al is necessary. When formation of a ball is performed according to arc discharge using the fine wire 7 formed with the film 8, faults such as breaking or bending of the fine wire 7, generation of a deformed ball, etc. are not generated, and the ball 3 of the prescribed size is formed at the tip of the fine wire stably.
申请公布号 JPS603134(A) 申请公布日期 1985.01.09
申请号 JP19830112196 申请日期 1983.06.20
申请人 MITSUBISHI DENKI KK 发明人 HIROTA SANEYASU
分类号 H01L21/60 主分类号 H01L21/60
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