| 摘要 |
PURPOSE:To enable instantaneous positioning of a reference position mark and a cross mark of an object to be detected by constituting a titled detector of a camera which enlarges or reduces the cross mark and detects the same as an image, a circulating sensor and a calculator for calculating the central point of the mark by calculating the central point of intersection of plural CCDs. CONSTITUTION:A camera (b) consists of a lens having a scale down or magnification power and the image from a microscope is equally well. A circulating sensor C is the one-dimensional image sensor constituted of optical analog/digital converting solid-state elements CCDs at the focus point of the camera and disposed with 360 or 720 pieces of the elements having the function to convert light to voltage in a circular shape. Said sensor is constituted of a photoelectric converting part, a CCD charge transfer register and output amplifier. A calculator (e) of a built-in CPU type is fast in time and the arithmetic operation with an external computer, personal computer, etc. through a suitable interface is also possible. |
