| 摘要 |
A micromachined device has two suspended masses (12a, 12b) positioned near each other, each of the masses being dithered along a dither axis (16). Two couplings (46), each including an arcuate member (48) and anchored support beams (52), are provided between the masses to allow relative anti-phase movement and to resist relative in-phase movement. The couplings (46) extend around a region intermediate the masses where a dither detection device is disposed. |
