| 摘要 |
<p>PURPOSE:To enable a fine flow to be controlled, by providing plural solenoid vales on a passage communicated to a cylinder and changing an overlapping time between the opening action of the valve in the downstream side and the closing action of the valve in the upstream side. CONSTITUTION:Communicating the upstream end of an operating medium passage 9 to a cylinder, the timing of a solenoid valve 10 in the upstream side starting its closing action control and the timing of a solenoid valve 11 in the downstream side starting its opening action control are optionally selected independently of each other and controlled by a processing device 12 of stored program data. The opening action is performed within a relatively short time by changing the opening and closing timings of the two valves to vary an operating medium flow in accordance with their overlapping time. Next, also when the closing action is performed, each valve is only opened or only closed. Accordingly, a fine flow is stably controlled by surely actuating the valves.</p> |
