发明名称 Micro-positioning system
摘要 The system consists of a translator, a stator and an adjustment mechanism which can make adjustments in position of the order of the gap between adjacent atoms in a solid (in the order of 10 power -10 m) The translator (1) and stator (2) of the positioning system are formed by a solid body (3). The translator is formed by utilising the non-elastic mechanical properties of a part of the this solid body displaced relative to the stator. In the solid body forming the translator and stator during its manufacture one or more slide planes or bands for the position adjustment can be marked out and the displaceable part formed by plastic deformation by the introduction of an external critical stress in the solid body.
申请公布号 DE19548587(A1) 申请公布日期 1997.07.10
申请号 DE19951048587 申请日期 1995.12.23
申请人 TECHNISCHE UNIVERSITAET DRESDEN, 01069 DRESDEN, DE 发明人 MEYER, DIRK, 01326 DRESDEN, DE;PAUFLER, PETER, PROF. DR.RER.NAT.HABIL., 01157 DRESDEN, DE;RICHTER, KURT, DR.RER.NAT., 01277 DRESDEN, DE;HARZ, MARTIN, 04720 HOECKENDORF, DE
分类号 B25J7/00;G01B7/00;G01B7/02;G05D3/10;G12B1/00;H01L41/09;H02N2/00;H02N2/02;(IPC1-7):G12B1/00;H01L41/22 主分类号 B25J7/00
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