发明名称 PROBE CARD FOR SEMICONDUCTOR
摘要 PURPOSE:To eliminate the displacement in the horizontal direction due to overdrive by a method wherein a needle is constituted of two beams fixed to a needle supporting part and a needle point part by which the point and the point of the two beams are linked. CONSTITUTION:Two beams 13 and 14 are fixed to a needle supporting part 11 fixed to a printed circuit board 10, and the point and the point of the beams 13 and 14 are linked by a needle point part 15. When the length between the fixed part and the fixed part of the beams 13 and 14 at the needle supporting part 11 is set at (a), the lengths of the beams 13 and 14 are respectively set at (b) and (c), and the length of the needle point part 15 is set at (d), a quadrilateral is constituted of sides (a), (b), (c) and (d), making the side (a) longer than the side (d). In case an overdrive amount (y) is applied, the displacement (x) in the horizontal direction of the needle point 15 can be almost eliminated by approprietly setting the lengths of (c) and (d) on condition of a>d.
申请公布号 JPS60748(A) 申请公布日期 1985.01.05
申请号 JP19830107667 申请日期 1983.06.17
申请人 HITACHI SEISAKUSHO KK 发明人 HANNO TSUTOMU
分类号 G01R31/26;G01R1/073;H01L21/66;(IPC1-7):H01L21/66;G01R1/06 主分类号 G01R31/26
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