发明名称 LOW TEMPERATURE REDUCTION
摘要 Glass photomasks having a high resolution stain pattern for use in photofabrication processes are made by migrating stain-producing ions into the surface of a glass substrate, and reducing and agglomerating the stain- producing ions in the presence of pure hydrogen under pressure at relatively low temperatures to produce a high resolution stain pattern. <IMAGE>
申请公布号 GB8429335(D0) 申请公布日期 1985.01.03
申请号 GB19840029335 申请日期 1984.11.21
申请人 发明人
分类号 C03C21/00;C03C23/00;G03F1/08;G03F1/54;G03F1/76 主分类号 C03C21/00
代理机构 代理人
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