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发明名称
SUBSTRATE WASHING DEVICE
摘要
申请公布号
JPH1092707(A)
申请公布日期
1998.04.10
申请号
JP19960238949
申请日期
1996.09.10
申请人
ASAHI SANAC KK
发明人
AMARI MASAHIKO;SAITO TAKAO;SEIKE YOSHIYUKI
分类号
H01L21/027;H01L21/304;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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