发明名称 |
Plasma developable negative resist compositions for electron beam, X-ray and optical lithography. |
摘要 |
<p>A negative resist composition including a polymeric matrix material, a polymerizable monomer, and an onium salt radiation sensitive initiator. The monomer is polymerized by irradiating the resist with an e-beam, x-ray, or ultraviolet source and heating the exposed resist. The resist is developed by a dry etchant such as plasma or a reactive ion etchant.</p> |
申请公布号 |
EP0130088(A2) |
申请公布日期 |
1985.01.02 |
申请号 |
EP19840304359 |
申请日期 |
1984.06.27 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
SHU, JING SHING;COVINGTON, JOHNNY B.;LEE, WEI;VENABLE, LARRY G.;VARNELL, GILBERT L. |
分类号 |
G03F7/20;C08F2/00;C08F2/50;G03C5/08;G03F7/029;G03F7/033;G03F7/038;H01L21/027;(IPC1-7):G03C1/68 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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