发明名称 |
Method of making electrostatic chuck with conformal insulator film |
摘要 |
A process for fabricating an electrostatic chuck (20) comprising the steps of (c) forming a base (80) having an upper surface with cooling grooves (85) therein, the grooves sized and distributed for holding a coolant therein for cooling the base; and (d) pressure conforming an electrical insulator layer (45) to the grooves on the base by the steps of (i) placing the base into a pressure forming apparatus (25) and applying an electrical insulator layer over the grooves in the base; and (ii) applying a sufficiently high pressure onto the insulator layer to pressure conform the insulator layer to the grooves to form a substantially continuous layer of electrical insulator conformal to the grooves on the base.
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申请公布号 |
US5753132(A) |
申请公布日期 |
1998.05.19 |
申请号 |
US19960725482 |
申请日期 |
1996.10.04 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SHAMOUILIAN, SHAMOUIL;SOMEKH, SASSON;LEVINSTEIN, HYMAN J.;BIRANG, MANOOCHER;SHERSTINSKY, SEMYON;CAMERON, JOHN F. |
分类号 |
B23Q3/15;H01L21/683;H02N13/00;(IPC1-7):B44C1/22 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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