| 摘要 |
PURPOSE:To shorten the required time from mask designing to the completion of exposure operation by using a two-dimensional optical switch which is formed by arranging valves for transmitting and cutting off light in two dimensions on the same plane as a mask for exposure. CONSTITUTION:A light transmission area of a transmission type dot matrix liquid-crystal display element LCD2 is selected corresponding to a figure to be transferred. Then, address signals are inputted from address lines 8 and 9 by a driver 7, and the LCD2 is driven to form a transmission area of light at a specific part, forming a mask pattern conforming to said figure on the LCD2. In this state, when the entire surface of the LCD2 is irradiated with light from a light source 3 through an optical system 4, the light is transmitted through the light transmisssion area of the LCD2 to irradiate only an area 6 on a body 1 to be exposed, which is exposed according to the mask pattern formed on the LCD2. Thus, the required time from the mask designing to the completion of the exposure operation is shortened.
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