| 摘要 |
PURPOSE:To detect disconnection of wire and missing of wire in order to prevent useless bonding by judging the bonding condition through detection of vibration waveform of vibrator and indicating the result of judgement or controlling the bonding operation. CONSTITUTION:A current flowing into a vibrator 7 is detected by a current detection circuit 13 and oscillation output is controlled by positive feed-back of this detected signal to an oscillator 9. Namely, when a load of vibrator 7 (load of tool) is small, a heavy current flows into the vibrator 7 and an oscillation output is increased by positive feed-back of such current. If a load becomes large, a small current flows into the vibrator 7. Therefore, an oscillation output is caused to become small in accordance with such current. For example, a discriminator 10 is connected to a part X of feedback loop. This discriminator 10 converts a feedback current to a voltage and stores voltage waveform under the normal bonding. Adequacy of bonding can be judged by comparison of both waveforms, and operation of machine is suspended or an alarm is issued in accordance with the result of such judgement. |
