| 摘要 |
PURPOSE:To permit detection of the temp. distribution on the surface of an object to be observed and easy analysis of a defect accident with high resolving power by scanning the surface of said object with a photon beam and detecting the photoelectron from the object. CONSTITUTION:The electron beam 6 from an electron gun 5 is converted to pulses by a combination of a pulse power source 26, a blanking plate 7 and a blanking aperture 8. The pulses are converged by an electron lens 9 and are irradiated onto a plate 11 on which a fluorescent material 11'is coated. The photon beam 13 generated by the plate 11 is converged by a lens 12 and is irradiated to a solid state circuit element 14. The scanning of the beam 13 is accomplished by deflecting the beam 6 with a coil 10. When the element 14 is locally heated owing to a short circuit accident or the like, a radiation of photoelectron arises and the output signal from a detector 19 is supplied via a signal processing circuit to a display tube 27, by which the temp. distributing condition is made visible. |
