| 摘要 |
PURPOSE:To improve productivity by adopting a walking beam in a carrying out mechanism and a load locking mechanism in a atmospheric pressure shielding mechanism. CONSTITUTION:Reaction gas 2 introduced through a gas introducing tube 6a and discharged from a gas discharging port 7a is filled in an air sealing tube 3a in a state of reduced pressure, and is heated by a heater 8a provided to the external periphery of the air-sealing tue 3a. A walking beam 11 penetrates the inside of the air-sealing tube 3a and conveys a wafer 1 to the right. Load locking mechanisms 12 are provided to both ends of the air-sealing tube 3a and comprise a chamber 13, gate vales 14, 15; the wafer 1 is conveyed through the gate valves 14, 15.
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