| 摘要 |
<p>PURPOSE:To simplify the manufacturing steps by forming a photoresist directly on a passivation film, exposing it with far ultraviolet ray to photoetch it, and then forming a color filter. CONSTITUTION:A water soluble resist is coated directly on a passivation film 5. Then, it is exposed through the prescribed mask with far ultraviolet ray to form the prescribed pattern. Then, it is dyed with cyan dye to form a cyan dye layer 7. Thereafter, an intermediate layer 8 is formed. Thereafter, a yellow dye layer 9 is formed similar to the step of forming the layer 7, and an overcoating layer 10 of transparent polymer resin is formed similarly to the step of forming the layer 8. Three primary color filters of red, blue and green are also formed in the similar steps. According to this manufacturing method, the steps of forming smooth layers can be omitted to shorten the manufacturing time.</p> |
