| 摘要 |
PURPOSE:To omit the necessity of a reference contact point, to facilitate manufacture, and to make it possible to perform simple, accurate measurement, by making one heat sensitive part to be a temperature measuring part, and making the other heat sensitive part to be a constant temperature part by overlapping the heat sensitive part with a constant-temperature heating body. CONSTITUTION:Materials 2 and 3 constituting a thermoelectric element are formed on a substrate 1 as thin films. Then, an electrode 4 made of a thin film heat sensitive element is formed. A junction part 5 of the thermoelectric element becomes a temperature measuring part. A constant temperature heating body 7 and an intermediate layer 6, which has insulating property and is to become a substrate for said constant temperature heating body 7, are overlapped, and this part becomes a constant temperature part. A voltage is generated in the electrode 4 based on the difference between the standard temperature of the constant temperature heating body 7 and the temperature to be measured at the temperature measuring part. The absolute temperature at the temperature measuring part is measured based on said voltage and the standard temperture of the constant temperature heating body 7. |
