| 摘要 |
PURPOSE:To make a laminating quantity constant, and also to obtain a film of high purity by providing an evaporation source vessel consisting of a heat exchange chamber which can store a thermal medium, and a recessed part formed so as to contain a vapor depositing material, on the surface of this heat exchange chamber, so that the temperature of the vapor depositing material is adjusted by a circulating thermal medium or refrigerant. CONSTITUTION:An evaporation source vessel 8 packed with an organic matter or a high polymer substance as a vapor depositing material is provided on the lower part of a carrying path of a magnetic recording medium 4, and a part of the vapor-depositing material evaporated from this evaporation source vessel 8 is vapor-deposited and laminated on the magnetic recording medium 4 being in a carrying state. When a thermal medium 26 is circulated between the first thermal medium tank 21 and the evaporation source vessel 8, if the temperature of the evaporation source vessel 8 detected by a temperature sensor 34 becomes higher than a set temperature, the temperature of the evaporation source vessel is lowered to the set temperature by switching three-way valves 24, 25 toward the second thermal medium 22 from the first thermal medium tank 21, and circulating a refrigerant 28 for a suitable time between the second thermal medium tank 22 and the evaporation source vessel 8. Switching of these three- way valves 24, 25 is executed automatically basing on an output of the temperature sensor 34 through a temperature regulator (not shown in the figure). |
