| 发明名称 |
Portable vacuum installation for production of thin metal coatings |
| 摘要 |
The installation has a chamber (C) within a chamber (1) and both chambers have vacuum seals (T) at their base. The chamber (1) has a connection (6) to its pumping system and a connection (10a) for gas entry. Similarly the chamber (C) has a connection (5) to its pumping system and a connection (10) for entry of a process gas.
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| 申请公布号 |
DE19904829(A1) |
申请公布日期 |
1999.08.26 |
| 申请号 |
DE19991004829 |
申请日期 |
1999.02.05 |
| 申请人 |
CE.TE.V. CENTRO TECNOLOGIE DEL VUOTO |
发明人 |
MISIANO, CARLO;SIMONETTI, ENRICO |
| 分类号 |
C23C14/04;C23C14/35;H01J37/34;(IPC1-7):C23C14/22 |
主分类号 |
C23C14/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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