| 摘要 |
PURPOSE:To uniformalize the thickness and surface roughness by swinging, in the radial direction, a rotary table onto which a lapping unit equipped with a polishing roller which can be moved up and down and onto which a wrapping film is taken-up is installed onto the upper surface thus eliminating the nonuniformity of grinding grains. CONSTITUTION:A polishing roller 11 is installed under a lapping unit 10 and swung up and down with an elevation board 17. This unit 10 is swung horizontally in the radial direction along a guide rail 25. A disc-shaped work is loaded onto the rubber plate 2 of a rotary table 1, and the table 1 is revolved at a prescribed speed, and then a taking-up shaft 12 and the roller 11 are driven to take- up a wrapping film 26. Then, the elevation board 17 is lowered by a handle 18, and the film 26 is pressed onto the disc-shaped work which revolves with a prescribed pressure by the roller 11. Then, the lapping unit 10 is swung in the radial direction by driving a motor, and the workpiece is polished. |
