| 摘要 |
PURPOSE:To prevent damage to the pellets by providing a damper member which supports a bonding arm from the lower side with contact to damp a vibration thereby forming an uniform contact bonding ball. CONSTITUTION:The damper member 37 is in contact with the lower side of a bonding arm 9 till a bonding tool 10 comes in pressure contact with a pellet 33 and a lead frame 34, after which the member separates from the arm 9. Accordingly, the damage to the pellet 33 due to the tool 10 is prevented. Also, a vibration of the tool 10 is substantially reduced and a stable shape of the ball 36 can be obtained. |
