| 摘要 |
PURPOSE:To privide a thin film lithium battery having a long storage life and stabilized performance by covering whole thin film with a protect film such as silicon nitride or silicon oxide and sealing it with resin film thereon. CONSTITUTION:An aluminium film 2 as positive current collector, a positive film 3 comprising titanium disulfide, a solid electrolyte film 4, a lithium metal film 5 as negative active material, and a nickel film 6 as negative current collector are stacked in order on a silicon substrate 1. A silicon film 7 is deposited thereon by spattering, then a nickel film 8 is vacuum-deposited, and whole battery elements are sealed with epoxy resion. By protecting whole battery forming materials with Si3N4 film and sealing with epoxy resin thereon, a thin film lithium battery having long stabilized performance and life is formed. |
