| 摘要 |
PURPOSE:To attain an inexpensive detecting system with a simple structure by forming the face, which faces a scale face of a scale member, with a fluorescent face to which a fluorescent paint is applied and diffusing and wavelength-converting the optical beam, which is made incident from the scale face, on the fluorescent face. CONSTITUTION:A standard scale member A has a scale face 14 where a scale is set with an accurate positional precision by an optical mask 13 which is formed on a surface 12 of a rectangular glass, which is polished into a plane, by metal vapor-deposition. Fluorescent materials are applied to the face facing this scale face 14 to form a rugged fluorescent face 15, and the optical beam incident from the scale face 14 is diffused on this fluorescent face 15, and this diffused light is received by a photodetector 18 provided near a side face 17 between the scale face 14 and the face facing the scale face 14.
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