发明名称 Method of forming large number of monocrystalline semiconductor regions on surface of insulator.
摘要 <p>When forming a large number of monocrystalline silicon regions on an insulator sheet, a large number of island regions of polycrystalline silicon are connected to one another in a predetermined direction by connecting regions, and are sequentially melted and regrown in that predetermined direction.</p>
申请公布号 EP0128581(A1) 申请公布日期 1984.12.19
申请号 EP19840106729 申请日期 1984.06.13
申请人 HITACHI, LTD. 发明人 KOBAYASHI, YUTAKA;FUKAMI, AKIRA;SUZUKI, TAKAYA
分类号 H01L27/00;H01L21/20;H01L21/768;H01L21/86;(IPC1-7):01L21/20;30B13/34 主分类号 H01L27/00
代理机构 代理人
主权项
地址