MANUFATURE OF SEMICONDUCTOR DEVICE

摘要

PURPOSE:To separate a conductor or semiconductor electrically by a method wherein a groove is formed on a conductor or semiconductor by irradiating laser beams while any residual insulating material in the groove is removed by a solution containing fluoride or gas. CONSTITUTION:A light transmitting and conductive film 2 mainly comprising tin oxide added with halogen element is formed on overall surface of a light transmitting surface 1. A groove 13 is formed by irradiating and scanning laser beams from lower side to form an electrode 2 between each interelement region 31, 11. This substrate 1 and a conductor thereon are immersed in a solution diluted with water by 3-100 times e.g. 10 times i.e. 1/10 HF for 1sec - 3min, normally 30sec. The conductive film may be separated electrically to perfection since the tin oxide is hardly resolved into 1/10 HF while the residual product in the groove is easy to be resolved into the solution.