| 摘要 |
PURPOSE: An operation method for a storage elevator of load lock chamber is provided to prevent that a wafer is broken while conveying the wafer in a storage elevator of load lock chamber. CONSTITUTION: A wafer(104) is loaded on a storage elevator, and a wafer which is not accurately aligned on a slot is detected by using a sensor before vertically moving the storage elevator. The storage elevator is vertically moved when there is no wafer not accurately aligned on the slot, and a process is performed. Thereby, if wafer alignment is not accurately performed in the storage elevator(100), the sensor senses this, and a motor driving the storage elevator is stopped, so that the wafer is not broken in a vertical moving passage of a storage elevator.
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