摘要 |
PURPOSE: A flange of a vertical-type diffusion chamber has O-ring insertion groove, prevents a fluctuation of O-ring(93), and achieves accurate sealing process. CONSTITUTION: A flange(360) of a vertical-type diffusion chamber forms O-ring insertion groove (363) to an external tube(40) mounting position, The O-ring insertion groove(363) is used to prevent a leakage. The external tube is mounted to the flange of a vertical-type diffusion chamber in order to perform a chemical vapor deposition process. A cross-section of the groove(363) has a round form. A cross-section of the groove(363) has a square form. Thereby, the flange of a vertical-type diffusion chamber has O-ring insertion groove, prevents a fluctuation of O-ring(93), and achieves accurate sealing process.
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