| 摘要 |
PROBLEM TO BE SOLVED: To improve the reliability of bonding by raising the precision in position detection for an encoder which detects position of a capillary in vertical direction, related to a bonding device. SOLUTION: The bonding device comprises a bonding arm 8 which holds a capillary 6 for bonding, a linear motor 10 which vertically swings the bonding arm 8, and an encoder 1 for detecting the position of the bonding arm 8. The encoder 1 comprises a magnetic scale plate 3 and a magnetic sensor 4, and a magnetic information for detecting the swinging position of the bonding arm 8 due to the linear motor 10 is recorded at the magnetic scale plate 3 in advance. The magnetic sensor 4 comprises a magnetic head for reading the magnetic information recorded in the magnetic scale plate 3, and the position in vertical direction of the capillary 6 is detected by reading the magnetic information recorded in the magnetic scale plate 3. |
