| 摘要 |
PURPOSE:To facilitate work and assembly, and reduce characteristic variation by applying solder glass to facing surfaces of a pressure receiving body and a pedestal body, and stacking and baking those pressure receiving body and pedestal body one over another. CONSTITUTION:A pressure sensor is manufactured by using the pressure receiving body 60 made of a single-crystal piezoelectric substrate, the pedestal body 70 made of a single-crystal piezoelectric substrate of the same material with the pressure receiving body 60, and the solder glass 80. The solder glass 80 is applied to the facing surfacs of the pressure receiving body 60 and pedestal body 70, which are stacked and baked. At this time, they are heated at 500-600 deg.C for about 10min, cooled gradually to about 100 deg.C for about eight hours, and then cooled naturally. This method facilitates the work and assembly and realizes the pressure sensor which has small characteristic variation with temperature. |
