| 摘要 |
PURPOSE:To shorten the time required for annealing treatment by scanning a material to be scanned by laser beams from a plurality of laser beam source sections. CONSTITUTION:First and second laser beams 51, 52 projected from first and second laser beam source sections 11, 12 are combined in a laser-beam combining section 20 to ajacent two laser beams 53. The laser beams 53 are scanned at arbitrary speed by a laser-beam scanning section 30, and projected to adjacent two positions of a sample helt to a sample holding section 40. In this case, the first beams 51 projected from the first laser beam source section 11 and the second beams 52 outputted from the second beam source section 12 are combined in the laser-beam combining section 20, and projected to the sample held to the sample holding section 40 as the laser beams 53 while the holding section 40 is driven by the scanning section 30, thus realizing beam scan. |
