| 摘要 |
PURPOSE:To obtain the titled apparatus having a mechamism for removing effectively only a contamination of an organic material adhering to a sample surface by providing a mercury-arc lamp of low pressure at a position opposed to the sample in a vacuum vessel, and providing a mechanism capable of supplying an oxygen to the sample surface. CONSTITUTION:The mercury-arc lamp 12 of low pressure and a nozzle 13 for supplying oxygen are provided at the position opposed to an analyzing sample 11. The sample 11 is attached to a sample base 14 in accordance with usual operation, an inner part of an analyzing chamber is evacuated, then, the lamp 12 is lit to irradiate ultraviolet ray to the surface of the sample 11, and the oxygen is leaked from the nozzle 13 by only a very small quantity to supply the oxygen to the surface of the sample 11. By this operation, ozone is generated near the surface of the sample 11, thereby, the organic contamination material at the sample surface is removed. After treating said surface in such a way only for 3min, the oxygen is stopped and the lamp 12 is turned off, the vacuum evacuation is performed successively for 20min, then the sample 1 is analyzed continuously. |
