Apparatus for observing silicon plate with semiconductor circuits has two microscopes placed on either side of housing, microscope having camera and light source and being linked to computer

摘要

Apparatus comprises observation housing (12) with microscopes (14, 16) placed on either side. Housing and microscopes are placed on frame (22). Displacement means (24) ensure displacement of specimen (18) perpendicularly to mutual axis of microscopes. Microscope (14) has camera (30) and light source (32), both placed on same side of specimen. Microscope (14) is linked to computer. An Independent claim is also included for the observation method.