METHOD OF PRODUCING SOLID-STATE COLOR IMAGING DEVICES

摘要

Solid state colour imaging device is made by integrating picture elements on an identical semiconductor substrate, in the shape of a matrix. Each element consists of a photoelectric conversion element and a scanning element. By photo-etching a film of colour filter material, mosaic colour filters are stacked on the picture elements. The colour filters are formed by using at least one mask with filter patterns in the shape of a matrix The filter patterns have reduced dimensions, compared to the picture elements.