BASE PLATE FOR CONNECTING FIBER FOR OPTICAL COMMUNICATION

摘要

PURPOSE:To improve dimensional accuracy and surface roughness by heating a metallic silicon powder molding contg. SiO2, SiC, Si3N4 and other components at specific weight % in a carbon monoxide atmosphere to cause reaction sintering so as to attain <=5% apparent porosity. CONSTITUTION:Metallic silicon powder is molded to the shape conforming to the shape of a base plate having a prescribed V-groove and the molding is put in a nitriding atmosphere and is then heated particularly in a carbon monoxide atmosphere to cause reaction sintering. The V-grooved base plate is so composed by such reaction sintering that the base plate contains 9-44wt% SiO2 and 5- 50wt% SiC within a 0.4-2.4 range in terms of an SiO2/SiC ratio and the balance Si3N4, Si and impurities and has <=5% apparent porosity. The reaction-sintered molding obtd. in the above-mentioned way satisfies the required performance of the base plate for connecting fibers for optical connection.