| 摘要 |
PURPOSE:To form easily magnetic films on many substrates at one time with one operation by forming a polygonal part of plural cathode assemblies provided internally with targets having V-shaped opposing surfaces, providing a shielding member at the center thereof and installing the substrates on the outside between the assemblies. CONSTITUTION:A hexagonal shaped shielding member 11 connected to earth potential is installed at the center of a vacuum vessel and V-shaped cathode assemblies 12-14 having the opened front, top and bottom surfaces are installed at the same potential around said member, thereby forming a triangular columnar ridge. Earth seals 15-17 and two sheets a set of flat plate-shaped targets 18A, 18B; 19A, 19B; 20A, 20B are installed to the assemblies 12-14 and doughnut-shaped base plates 24-26 are installed rotatably to face the spacings 21- 23 of the assemblies 12-14. Then the component from, for example, the target 19B is made incident to the right side part of the substrate 24 in the range of the incident angle alpha to beta. The component from the target 18B is made incident to the left side part of the plate 24 in the range of the incident angle alpha to beta and these components are deposited uniformly on said base plate. |
