发明名称 TRANSFER PIN, COLLET AND DIE BONDER USING THEM
摘要 PROBLEM TO BE SOLVED: To provide a transfer pin, a collet and a die bonder capable of efficiently transferring an adhesive, and transporting a semiconductor device bonding a chip by flip-chip bonding without reducing the yield. SOLUTION: Since the tip part of the transfer pin 9 has two projected parts having a length longer than the depth to which an adhesive 2 in a storage saucer 3 is subsided from the surface, the pin can transfer the adhesive 2 to two points by one time transferring operation. The suction hole of the collet 10 has a diameter larger than a semiconductor chip, the collect 10 can lower the load to be applied to the bump which connects the semiconductor chip to a sub-mount substrate at the time of picking up or stopping the movement after adsorption.
申请公布号 JP2002028568(A) 申请公布日期 2002.01.29
申请号 JP20000215712 申请日期 2000.07.17
申请人 KOHA CO LTD 发明人 TEJIMA MASATAKA
分类号 B05D7/24;B05C1/02;B05D1/28;H01L21/52;(IPC1-7):B05D7/24 主分类号 B05D7/24
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