发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To contrive the improvement of durability of a die bonding by bonding and fixing a semiconductor chip with selecting the most suitable values of the factors of curing condition by using the conductive paste consisting of a heat- resistance resin binder mixed with conductive particles. CONSTITUTION:The semiconductor chip 2 is die-bonded virtually in the center of a large area region of a lead frame 1 while interposing the conductive paste 3. For the paste 3, the heat-resistance resin in which Ag particles are dispersed is most suitable. Quantity of the paste 3 to be dripped onto the frame 1 is preferably as least as possible within a range where the chip 2 is bonded with the frame 1 almost perfectly. Next, a layer of the Ag paste driped is stretched thinly and the chip 2 is placed by pressing with vibration. Next, preliminary curing with low temperature for slow curing speed is performed prior to heating. After the preliminary curing, curing with higher temperature is performed in a short time. By this method, the overall improvement with regard to the durability of a die bonding can be contrived.
申请公布号 JPS59220938(A) 申请公布日期 1984.12.12
申请号 JP19830097334 申请日期 1983.05.30
申请人 SHARP KK 发明人 KADA MORIHIRO
分类号 H01L21/52;H01L23/495 主分类号 H01L21/52
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