| 摘要 |
PURPOSE:To unnecessitate the strict control of laser output by a method wherein a plurality of the first clear electrodes are formed on a transparent insulation substrate at fixed intervals, which are covered with a photosemiconductor layer, and further provided with the second electrode for series connection, thereafter, when said layer is split into a plurality of photoelectric conversion regions with laser beams, a difficultly processed conductive protection layer is provided at the position of beam irradiation. CONSTITUTION:A plurality of the first electrode layers 11a and 11b and the like made of SnO2, etc. are formed on the transparent glass substrate at intervals 11', and said conductive protection layer 12 of Ag, Au, Pt, etc. is adhered on the layer 11b' alternately arranged thereof. Next, a photoconductive layer 13 of amorphous Si is deposited over the entire surface and then removed from the part of the interval 11' to the most of the layer 12. Thereafter, the second electrode layer 14 is adhered over the entire surface, and the end of the layer 12 is irradiated with the laser beam, thus generating therein the individual second electrode layers 14a and 14b separated at intervals 14'. Afterwards, photoconductive regions 15a and 15b and the like constructed of these electrodes are connected in series. |
