APPARATUS FOR ALIGNING A WAFER,申请号EP19820102834-传众专利搜索

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发明名称	APPARATUS FOR ALIGNING A WAFER
摘要
申请公布号	EP0063289(A3)	申请公布日期	1984.12.12
申请号	EP19820102834	申请日期	1982.04.02
申请人	THE PERKIN-ELMER CORPORATION	发明人	QUINN, PETER, W.
分类号	H01L21/68;H01L21/677;(IPC1-7):H01L21/68;H05K13/02	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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