POSITION FIXING METHOD, POSITION FIXING APPARATUS AND HANDLER USING POSITION FIXING APPARATUS

摘要

PROBLEM TO BE SOLVED: To realize a position fixing method and a position fixing apparatus which can reduce positional deviation of a device to be inspected as caused by temperature changes and a handler using the apparatus. SOLUTION: A tray is provided with a recessed part to fix the position of the device to be inspected at an inspection place with the device fitted into the recessed part. A vacuum pump is linked to the recessed part and evacuates it to suck the device therein.