发明名称 |
Magnetically-assisted sputtering method for producing vertical recording media |
摘要 |
Disclosed is a method for producing vertical recording media by using magnetically-assisted sputtering apparatus to sputter from a magnetic target while selected portions of the target are heated to a temperature at or above Curie. Also disclosed are improved means for supporting the magnetic target during sputtering which permits the realization of enhanced sputtering efficiencies.
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申请公布号 |
US4487675(A) |
申请公布日期 |
1984.12.11 |
申请号 |
US19830546411 |
申请日期 |
1983.10.28 |
申请人 |
MECKEL, BENJAMIN B. |
发明人 |
MECKEL, BENJAMIN B. |
分类号 |
C23C14/34;H01J37/34;(IPC1-7):C23C15/00 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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