Liquid crystal display having aluminum wiring

摘要

A method of manufacturing a liquid crystal display, has the steps of: (a) heating a liquid crystal display substrate and forming a main wiring layer of Al or Al alloy thereon, in which grains are grown in the formed main wiring layer and the substrate is heated to such a temperature as the main wiring layer has an irregular surface having an average roughness Ra of 3 nm or larger, or (a1) forming a main wiring layer of Al or Al alloy on a liquid crystal display substrate and (a2) exposing the substrate to an atmosphere containing oxygen to naturally oxidize a surface of the main wiring layer; (b) forming a heat resistant cover metal layer on the main wiring layer to form a laminated metal layer; and (c) heating the substrate and forming an insulating film on the laminated metal layer by CVD.