| 摘要 |
PURPOSE:To improve working stability as well as an yield while preventing tube damage by giving speific value to the frequency of a high frequency heating device which heats a getter device. CONSTITUTION:Getter flushing is performed by making a high frequency current to flow through a coil 7. Thereby, the temperature of a getter device 4 rises up to about 900-1,000 deg.C 5-10sec after starting the high frequency heating and a getter agent 4b is evaporated while generating creepage discharge between a getter film 10 and a spring 5. Therefore, when the frequency of the high frequency heating device is lowered down to 200-350kHz, the creepage discharge starting voltage is raised thus preventing creepage discharge. Accordingly, tube damage is excluded while improving working stability as well as an yield. |
