| 摘要 |
PURPOSE:To improve the mold releasing performance between the mold surface and the resin used as a material of an optical recording medium and to improve the production yield of a substrate for optical recording medium using transcription, by applying an oxygen plasma process to the surface of a metallic mold after it is exfoliated from a master disk and using such a mold as a stamper. CONSTITUTION:A chrome electrode layer 3, a nickel electrode layer 4 and a nickel plated layer 5 are formed by vapor deposition on a master disk 2 formed on a glass substrate 1 by photoresist. The layer 3 is exfoliated from the disk 2, and a metallic mold having a monolithic structure of layers 3-5 is obtained. Then the photosensitive resin, i.e., the material of the disk 2 attached to the surface of the metallic mold, i.e., the surface of the layer 3 is dissolved away. Then an oxygen plasma process is applied to the surface of the layer 3. |
