| 摘要 |
PROBLEM TO BE SOLVED: To provide a environmentally friendly cleaning fluid, capable of preventing corrosion of metal, and simultaneously capable of reducing an etching amount of a polysilicone. SOLUTION: This cleaning fluid contains a corrosion inhibitor of chemical formula 1 (one of R<SB>1</SB>and R<SB>4</SB>is hydroxy and the other is an alkyl, an alkoxy, amino, nitro, mercapto, hydroxy, aldehyde, carboxyl, H or a halogen; and R<SB>2</SB>and R<SB>3</SB>are each a 0-10C straight-chain or branched-chain hydrocarbon residue) and a surfactant of chemical formula 2 [R<SB>5</SB>is methyl; A is HO(CH<SB>2</SB>CH<SB>2</SB>O)<SB>L</SB>(CH(CH<SB>3</SB>O)CH<SB>2</SB>O)<SB>M</SB>- (L and M are each an integer of 0 to 15) or hydroxy; and K is an integer of 3 to 22]. COPYRIGHT: (C)2005,JPO&NCIPI
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