| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for purifying a metal alkoxide on an industrial scale in high efficiency at a low cost, effective for decreasing or eliminating a halogen element, especially chlorine element remaining in the metal alkoxide and suitable for using in the case necessitating a highly pure metal alkoxide for electronic materials, etc., e.g. the production of a highly pure fine powder by the hydrolysis of the metal alkoxide or the production of an oxide thin film from the metal alkoxide. SOLUTION: The metal alkoxide is purified by adding a basic carbonate of a metal to a solution of a crude metal alkoxide containing a halogen element and separating and removing the formed product bonded with the halogen. COPYRIGHT: (C)2005,JPO&NCIPI
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