| 摘要 |
PURPOSE:To prevent the increase in the oxygen concentration of the molten liquid in the main crucible with time, and to manufacture a high-quality single crystal, by supplying the molten liquid of the single crystal raw material from a subsidiary crucible to the main crucible parallel to the pulling of the single crystal rod from the main crucible. CONSTITUTION:The single crystal rod 8 is grown and pulled up with the pulling axis 7 from the molten raw material of the single crystal in the main crucible 2 made of quartz, heated with a heater 3, and placed in the air-tight furnace 1. In the above process, the subsidiary crucible 4 furnished with the heater 5 and the trough 9, and the raw material 10 of single crystal suspended by the suspension axis 11, are placed in the furnace 1, and the single crystal raw material 10 is lowered into the subsidiary crucible 4 with the suspension axis 11 according to the pulling of the single crystal rod 8. The obtained molten liquid having low oxygen concentration is overflowed from the trough 9 and supplied to the main crucible 2. Consequently, the increase in the oxygen concentration of the molten liquid in the main crucible caused by the pulling up of the single crystal rod can be prevented. |
