| 摘要 |
PURPOSE:To manufacture a high-quality single crystal, by supplying molten raw material of single crystal continuously from a subsidiary crucible to the main crucible parallel to the pulling of the single crystal rod from the main crucible, thereby controlling the level of the molten liquid in the main crucible at a definite level. CONSTITUTION:The single crystal rod 10 is grown and pulled up with the pulling axis 9 from the molten liquid of the single crystal raw material in the main crucible 2 made of quartz, heated with the heater 3 and placed in the air-tight furnace 1. In the above process, the subsidiary crucibles 4, 4' furnished with respective heaters 5, 5' and the troughs 11, 11' to feed the molten liquid to the main crucible, and the single crystal raw materials 12, 12' suspended by the chucks 14, 14'and the suspension axes 13, 13', are placed in the air-tight furnace. The molten liquid of the single crystal raw material supplied from etiehr of the subsidiary crucibles through the trough to the main crucible 2 is inspected by a camera (not shown), and the main crucible is replenished with the molten liquid so as to maintain a constant liquid level. |
