글로방전 침착장치,申请号KR19830006055-传众专利搜索

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发明名称	글로방전 침착장치
摘要	<p>내용 없음</p>
申请公布号	KR840007319(A)	申请公布日期	1984.12.06
申请号	KR19830006055	申请日期	1983.12.21
申请人	null, null	发明人	프램나스 (외 1)
分类号	H01L31/04;C23C16/509;H01J37/32;H01L21/205	主分类号	H01L31/04
代理机构		代理人
主权项
地址

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