发明名称 |
PROCESS FOR THE MANUFACTURE OF POLYCRYSTALLINE FILMS OF SEMICONDUCTORS FORMED BY COMPOUNDS OR ELEMENTS, AND FILMS THUS OBTAINED |
摘要 |
There is described a method for preparing polycrystalline semi-conducting films comprised of two elements respectively from Groups III and V, or Groups II and VI of the Periodic Table, by irradiating with a laser beam a film which is comprised of at least two layers from elements selected with a stoichiometric ratio, said film being deposited over a non-crystalline substrate and being coated with a protective layer, which method is comprised of irradiating said film with a structured laser beam to cause crystallizing into crystallites which are regularly aligned and with a size at least equal to the thickness of the resulting film. |
申请公布号 |
DE3166961(D1) |
申请公布日期 |
1984.12.06 |
申请号 |
DE19813166961 |
申请日期 |
1981.07.29 |
申请人 |
L'ETAT BELGE, REPRESENTE PAR LE SECRETAIRE GENERAL DES SERVICES DE LA PROGRAMMATION DE LA POLITIQUE SCIENTIFIQUE |
发明人 |
LAUDE, LUCIEN DIEGO |
分类号 |
C30B1/02;C30B1/08;(IPC1-7):C30B1/08;C30B29/06;C30B29/40;C30B29/48;H01L21/26 |
主分类号 |
C30B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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