发明名称 PROCESS FOR THE MANUFACTURE OF POLYCRYSTALLINE FILMS OF SEMICONDUCTORS FORMED BY COMPOUNDS OR ELEMENTS, AND FILMS THUS OBTAINED
摘要 There is described a method for preparing polycrystalline semi-conducting films comprised of two elements respectively from Groups III and V, or Groups II and VI of the Periodic Table, by irradiating with a laser beam a film which is comprised of at least two layers from elements selected with a stoichiometric ratio, said film being deposited over a non-crystalline substrate and being coated with a protective layer, which method is comprised of irradiating said film with a structured laser beam to cause crystallizing into crystallites which are regularly aligned and with a size at least equal to the thickness of the resulting film.
申请公布号 DE3166961(D1) 申请公布日期 1984.12.06
申请号 DE19813166961 申请日期 1981.07.29
申请人 L'ETAT BELGE, REPRESENTE PAR LE SECRETAIRE GENERAL DES SERVICES DE LA PROGRAMMATION DE LA POLITIQUE SCIENTIFIQUE 发明人 LAUDE, LUCIEN DIEGO
分类号 C30B1/02;C30B1/08;(IPC1-7):C30B1/08;C30B29/06;C30B29/40;C30B29/48;H01L21/26 主分类号 C30B1/02
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